Non-Newtonian Film Thickness Formation in Ultra-thin Film

Integrated ultra-thin-film gas sensors

The fabrication and performance of an ultra-thin-film integrated gas sensor for detecting impurities in semiconductor process gases are described. Detector responses are based on gas-induced resistance changes in an ultra-thin Ti-P film mounted on a thin dielectric window supported by a silicon rim. The window temperature can be shifted several hundred degrees Celsius in less than one second. G...

Thickness Dependence of Sensitivity in Thin Film Tin Oxide Gas Sensors Deposited by Vapor Pyrolysis

Transparent SnO2 thin films were deposited on porcelain substrates using a chemical vapor deposition technique based on the hydrolysis of SnCl4 at elevated temperatures. A reduced pressure self-contained evaporation chamber was designed for the process where the pyrolysis of SnCl4 at the presence of water vapor was carried out. Resistive gas sensors were fabricated by providing ohmic contacts o...

Assessment of Ultra-Thin SiO2 Film Thickness Measurement Precision by Ellipsometry

The ellipsometric film thickness measurement precision for equivalent oxide thickness as prescribed by the International Technology Roadmap for Semiconductors is quite high. Although short-term precision on a single ellipsometric instrument can be quite high, deviations of measured film thickness from instrument-to-instrument and from lab-to-lab for short-term and long-term periods of time need...

Segregation and Stability in Ultra - Thin Film Polymer - Polymer

Dedication To Mr. Albin and Mr. Miller for recognizing that a student is not a vessel to be filled, but a fire to be lit.

Thickness-dependent mobility in tetracene thin-film field-effect-transistors